作為未來幾年高端期刊的目標，微系統和納米工程致力于促進從基礎研究到應用研究的微系統和納米工程各個方面的研究。這本雜志將發表關于微系統和納米工程前沿和新興主題的原創文章和評論，文章應具有高質量、高興趣和深遠的影響。這本新雜志的范圍涵蓋了新的設計（理論、建模和模擬）、制造、表征、可靠性，以及設備和系統在微觀和納米尺度上的應用。這本新雜志將為最新的研究提供一個家，為新的多學科領域的科學家之間的交流和合作提供一個平臺。期刊范圍內特別感興趣的主題包括但不限于下列主題：微納系統新物理微觀和納米力學，建模用于微和納米系統的新材料微觀和納米結構微型和納米傳感器微型和納米執行器微流體和納米流體聚合物MEMS和NEMS生物醫學MEMS和NEMS能量收集和能量MEMS微型和納米光學、光學MEMS集成光子學、混合光學和電子集成納米光子系統和電路，微波光子學微型和納米工程系統、集成微型系統和功能性納米系統微納米制造技術、“自上而下”和“自下而上”技術微納米系統的表征微尺度和納米尺度的質量和傳熱微納系統應用科學

Microsystems & Nanoengineering, with a target for a high-end journal for years to come, seeks to promote research on all aspects of microsystems and nanoengineering from fundamental to applied research. This journal will publish original articles and reviews on cutting-edge and emerging topics in microsystems and nanoengineering, and articles should be of high quality, high interest, and far-reaching consequence. The scope of this new journal covers new design (theory, modelling, and simulation), fabrication, characterization, reliability, and applications of devices and systems in micro- and nano-scales. This new journal will provide a home for the latest research and a platform for more exchange and collaboration among scientists in the new multidisciplinary area. Topics of particular interest within the journal's scope include, but are not limited to, those listed below:New physics of micro- and nano-systemsMicro- and nano-mechanics, modellingNew materials for micro- and nano-systemsMicro- and nano-structuresMicro- and nano-sensorsMicro- and nano-actuatorsMicro- and nano-fluidicsPolymer MEMS and NEMSBiomedical MEMS and NEMSEnergy harvesting and power MEMSMicro- and nano-optics, optical MEMSIntegrated photonics, hybrid optical and electronic integrationNanophotonic systems and circuits, microwave photonicsMicro- and nano-engineered systems, integrated microsytems and functional nanosystemsMicro-and nano-fabrication technologies, “top-down” and “bottom-up” technologiesCharacterization of micro- and nano-systemsMicro- and nano-scale mass and heat transferApplied sciences of micro- and nano-systems